The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
May. 23, 2002
Matthias Brunner, Kirchheim, DE;
Shinichi Kurita, San Jose, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Edgar Kehrberg, Haar, DE;
Matthias Brunner, Kirchheim, DE;
Shinichi Kurita, San Jose, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Edgar Kehrberg, Haar, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate.