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Franklin, MA, United States of America

E Derryck Settles

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.4

ph-index = 5

Forward Citations = 128(Granted Patents)

Location History:

Sunnyvale, CA (US) (2001 - 2003)
Franklin, MA (US) (2002 - 2004)

Company Filing History:

Novellus Systems Incorporated

Years Active: 2001-2004

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6709557 - Sputter apparatus for producing multi-component metal alloy films and method for making the same (2004-03-23),

2. 6607982 - High magnesium content copper magnesium alloys as diffusion barriers (2003-08-19),

3. 6525829 - Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity (2003-02-25),

4. 6461155 - Method and apparatus for heating substrates in supercritical fluid reactor (2002-10-08),

5. 6319842 - Method of cleansing vias in semiconductor wafer having metal conductive layer (2001-11-20),

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