Location History:
- Urbana, IL (US) (2009)
- Albany, CA (US) (2013 - 2020)
Company Filing History:
Years Active: 2009-2020
Title: The Innovative Journey of Do Young Kim
Introduction
Do Young Kim, based in Albany, California, is a distinguished inventor known for his significant contributions to the fields of semiconductor fabrication and materials science. With five patents to his name, he has developed innovative solutions that enhance technological capabilities in various applications.
Latest Patents
Among his latest patents, Kim has made strides in the deposition of ruthenium layers in interconnect metallization. This process involves the deposition of a thin, protective ruthenium film under reducing conditions, followed by a fill step under oxidizing conditions. The innovation lies in the protective layers that facilitate ruthenium fill without oxidizing the underlying metal features, promoting efficiency in semiconductor manufacturing.
Another noteworthy patent is focused on internal plasma grid applications for semiconductor fabrication. This invention features improved methods and apparatus for etching a semiconductor substrate using a plasma grid assembly. This assembly divides the reaction chamber into upper and lower sub-chambers, optimizing the passage of certain species and enabling the generation of ion-ion plasma, which can be applied in various etching processes.
Career Highlights
Do Young Kim has worked with reputable organizations such as Lam Research Corporation and the University of Illinois. His tenure at these institutions has allowed him to push the boundaries of semiconductor technology through his innovative approaches and practical implementations.
Collaborations
Kim's journey as an inventor has been enriched by collaborations with notable colleagues, including Gregory S. Girolami and John Abelson. These partnerships have fostered a creative environment, leading to the development of groundbreaking technologies in their respective fields.
Conclusion
Do Young Kim's inventions and patents are a testament to his creativity and persistence in the realm of technology. As he continues to innovate, his work promises to influence future advancements in semiconductor fabrication and beyond. Kim's journey reflects the spirit of invention that drives progress in today's rapidly evolving technological landscape.