Dresden, Germany

Dirk Wollstein


Average Co-Inventor Count = 3.1

ph-index = 1

Forward Citations = 14(Granted Patents)


Company Filing History:


Years Active: 2004-2025

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6 patents (USPTO):Explore Patents

Title: Dirk Wollstein: Innovator in Lithography and Electrochemical Deposition

Introduction

Dirk Wollstein is a notable inventor based in Dresden, Germany. He has made significant contributions to the fields of lithography and electrochemical deposition, holding a total of 6 patents. His work focuses on developing systems and methods that enhance the precision and reliability of manufacturing processes.

Latest Patents

One of his latest patents is titled "System and method for detecting a defect in a specimen." This patent relates to a lithography exposure system designed to detect dispensing errors in wafers. The system includes a measurement unit that captures topography data of the specimen through optical signal illumination. A processor then analyzes this data to generate statistical information and issues a defect notification if the data falls outside of predetermined control limits.

Another significant patent is "Automatic deposition profile targeting." This method involves electrochemically depositing copper using a position-dependent controllable plating tool. The process includes measuring the actual thickness profile of the deposited copper and generating measurement data. This data is then utilized in an advanced process control model to calculate necessary corrections for plating parameters.

Career Highlights

Dirk Wollstein has worked with prominent companies in the semiconductor industry, including Advanced Micro Devices Corporation and Globalfoundries U.S. Inc. His experience in these organizations has allowed him to develop innovative solutions that address critical challenges in manufacturing.

Collaborations

Throughout his career, Dirk has collaborated with talented professionals such as Jan Raebiger and André Holfeld. These partnerships have contributed to the advancement of his research and the successful implementation of his inventions.

Conclusion

Dirk Wollstein's contributions to the fields of lithography and electrochemical deposition demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of manufacturing processes and a drive to improve them. His work continues to influence the industry and inspire future advancements.

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