Dirk Rothweiler

Title: Dirk Rothweiler: Innovator in EUV Illumination Systems

Introduction

Dirk Rothweiler is a prominent inventor based in Bangkok, Thailand. He has made significant contributions to the field of illumination systems, particularly in the area of extreme ultraviolet (EUV) technology. With a total of 2 patents, Rothweiler's work is recognized for its innovative approach to optical elements and light sources.

Latest Patents

Rothweiler's latest patents include an "EUV illumination system having a plurality of light sources for illuminating an optical element." This patent describes an illumination system that features a first and a second light source, each providing light with a wavelength of ≤193 nm. The first light source illuminates a specific area of the optical element, while the second light source illuminates another area. Another notable patent is the "Illumination system with a plurality of light sources," which outlines an illumination system designed for EUV wavelengths. This system incorporates multiple EUV light sources and an optical unit that combines these sources effectively.

Career Highlights

Dirk Rothweiler is currently associated with Carl Zeiss SMT AG, a company renowned for its advancements in optical systems and technologies. His work at this esteemed organization has allowed him to push the boundaries of innovation in the field of illumination systems.

Collaborations

Rothweiler has collaborated with notable colleagues, including Jörg Schultz and Wolfgang Singer. These partnerships have contributed to the development of cutting-edge technologies in the realm of EUV illumination.

Conclusion

Dirk Rothweiler stands out as a key figure in the innovation of EUV illumination systems. His patents and work at Carl Zeiss SMT AG reflect his commitment to advancing optical technology.