The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
May. 05, 2003
Applicants:
Dirk Rothweiler, Bangkok, TH;
Jörg Schultz, Aalen, DE;
Inventors:
Dirk Rothweiler, Bangkok, TH;
Jörg Schultz, Aalen, DE;
Assignee:
Carl Zeiss SMT AG, Oberkocken, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21G 5/00 (2006.01); G03B 21/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided an illumination system for EUV-wavelengths. The illumination system includes a plurality of EUV-light sources and an optical unit combining the plurality of EUV-light sources.
Quick Actions:
Rothweiler, Dirk. (2006). Illumination system with a plurality of light sources (U.S. Patent No. 7071476). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7071476
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