Location History:
- Aalen, DE (2014)
- Lauchheim, DE (2015 - 2020)
Company Filing History:
Years Active: 2014-2020
Title: Dirk Juergens: Innovator in Optical Systems
Introduction
Dirk Juergens, an accomplished inventor based in Lauchheim, Germany, has made significant contributions to the field of optical systems. With a total of nine patents to his name, he is known for his innovative solutions that enhance lithography machines and projection devices.
Latest Patents
Among his latest inventions is an advanced optical system designed for lithography machines. This innovative system features a main mirror element accompanied by a manipulator device for precise positioning and orientation. The optical system incorporates an optically active surface that reflects radiation, along with an actuator matrix that can deform the surface to modify its reflective properties. A notable aspect of this invention is the gap between the actuator matrix and the main mirror element, ensuring optimal separation for performance enhancement.
Juergens has also developed an illumination system for microlithographic projection devices. This system includes an image plane suitable for masking arrangements and a first object plane that is optically conjugate to the image plane. Two illumination optical units operate within this system, with distinct projection light profiles and angle distributions to achieve superior imaging results.
Career Highlights
Dirk Juergens has established his career at Carl Zeiss SMT GmbH, where he continues to push the boundaries of optical engineering. His work involves not only the design of complex optical systems but also the enhancement of existing technologies to meet the growing demands in the precision optics industry.
Collaborations
Throughout his career, Juergens has collaborated with talented coworkers, including Olaf Conradi and Michael Totzeck. These professional relationships have fostered a dynamic and innovative environment, enabling the exchange of ideas that contribute to groundbreaking advancements in optical technology.
Conclusion
Dirk Juergens stands out as a prominent inventor in the field of optical systems, with numerous patents showcasing his expertise and creativity. His contributions, particularly in lithography and microlithographic projection devices, reflect a deep understanding of complex optical mechanics and a commitment to innovation that continues to drive the industry forward.
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