Dimitri R Kioussis

Title: Innovations of Dimitri R Kioussis

Introduction

Dimitri R Kioussis is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, holding a total of nine patents. His work focuses on improving gas distribution systems and methods, which are crucial for achieving uniform plasmas during semiconductor operations.

Latest Patents

One of his latest patents is titled "Multi-zone gas distribution systems and methods." This technology enhances gas distribution designs, allowing for improved control of reactant input distribution. By enabling separate flows of reactants to different regions of the plasma, it addresses irregularities in process uniformity. This innovation ensures that substrates experience a more uniform etch or deposition profile across their surfaces.

Another notable patent involves "Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers." This patent outlines methods for altering film stress while enhancing etch selectivity. The process includes depositing amorphous carbon hardmask layers onto substrates and conducting rapid thermal anneal operations, which last 60 seconds or less. This operation heats the substrate to temperatures between 600 and 1,000 degrees Celsius before etching.

Career Highlights

Dimitri R Kioussis is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has positioned him as a key player in advancing semiconductor processing technologies.

Collaborations

Throughout his career, Dimitri has collaborated with talented individuals such as Mikhail Korolik and Saravjeet Singh. These collaborations have contributed to the development of innovative solutions in the semiconductor field.

Conclusion

Dimitri R Kioussis is a distinguished inventor whose work has significantly impacted semiconductor processing technologies. His innovative patents and contributions to Applied Materials, Inc. highlight his expertise and commitment to advancing the industry.