Dieter Frank

Title: Dieter Frank: Innovator in Wafer Processing Technology

Introduction

Dieter Frank is a notable inventor based in Lind ob Velden, Austria. He has made significant contributions to the field of wafer processing technology, holding a total of 7 patents. His innovative work focuses on improving methods and apparatuses for treating wafer-shaped articles.

Latest Patents

Dieter Frank's latest patents include an "Apparatus for treating surfaces of wafer-shaped articles." This invention features a process chamber and a rotary chuck that operates without physical contact, utilizing a magnetic bearing. The rotary chuck is designed with gripping pins to hold wafer-shaped articles securely. Additionally, it includes a rotating plate that protects the upper surfaces of the process chamber from liquids during operation. Another significant patent is the "Method and apparatus for liquid treatment of wafer-shaped articles." This invention involves a spin chuck for holding and rotating wafer-shaped articles, along with a liquid dispenser that delivers an organic liquid while ensuring minimal gas content through a degasifying unit.

Career Highlights

Dieter Frank is currently associated with Lam Research AG, a company known for its advanced semiconductor manufacturing equipment. His work at Lam Research AG has been pivotal in enhancing the efficiency and effectiveness of wafer processing technologies.

Collaborations

Dieter collaborates with talented individuals such as Michael Puggl and Alexander Schwartzfurtner, contributing to a dynamic team focused on innovation in the semiconductor industry.

Conclusion

Dieter Frank's contributions to wafer processing technology through his patents and work at Lam Research AG highlight his role as a leading inventor in this field. His innovative approaches continue to shape the future of semiconductor manufacturing.