Dewen Zhao

Title: Dewen Zhao: Innovator in Metal Film Measurement and Polishing Technology

Introduction

Dewen Zhao, an accomplished inventor based in Beijing, China, has made significant contributions to the field of precision measurement and material processing. With a portfolio that includes two patents, he has demonstrated a commitment to advancing technology in his areas of expertise.

Latest Patents

Dewen Zhao's latest innovations include two notable patents that address essential challenges in the industry. The first patent is a **Device for globally measuring the thickness of metal film**. This sophisticated device comprises a base, a rotating unit with a fixed member and a rotating member connected by a rotating joint, along with a working table designed to establish vacuum passages. The measuring head, equipped with an eddy current probe, faces the surface of the working table to deliver precise measurements of metal film thickness.

The second patent is a **Chemical mechanical polishing machine and chemical mechanical polishing apparatus**. This invention features a work table with a polishing platen, pad conditioner, and a slurry-delivery device strategically positioned near the polishing platen. Furthermore, it includes a robotic manipulator that facilitates the loading and unloading of wafers, demonstrating a blend of innovation in automation and surface processing technology.

Career Highlights

Dewen Zhao's career has been significantly shaped by his work with reputable organizations. He has provided his expertise at Hwatsing Technology Co., Ltd., where he contributed to various technological advancements. Additionally, his role at Tsinghua University has allowed him to engage in cutting-edge research and development, further broadening his impact on the innovation landscape.

Collaborations

In his journey as an inventor, Dewen Zhao has worked alongside esteemed colleagues, including Xinchun Lu and Yongyong He. These collaborations have enriched his work and contributed to the successful development of his patented technologies.

Conclusion

Dewen Zhao stands out as a key figure in the realm of innovations in metal film measurement and chemical mechanical polishing. His patents not only highlight his technical expertise but also underscore his contribution to the advancement of manufacturing technologies. As he continues to work and collaborate within the industry, he is sure to foster further innovations that will benefit the technological landscape.