The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Nov. 17, 2011
Xinchun LU, Beijing, CN;
Dewen Zhao, Beijing, CN;
Zilian Qu, Beijing, CN;
Qian Zhao, Beijing, CN;
Yongyong He, Beijing, CN;
Yonggang Meng, Beijing, CN;
Xinchun Lu, Beijing, CN;
Dewen Zhao, Beijing, CN;
Zilian Qu, Beijing, CN;
Qian Zhao, Beijing, CN;
Yongyong He, Beijing, CN;
Yonggang Meng, Beijing, CN;
TSINGHUA UNIVERSITY, Beijing, CN;
Abstract
A device for globally measuring a thickness of a metal film (), comprises: a base (); a rotating unit () comprising a fixed member () fixed on the base () and a rotating member () having a rotating joint (); a working table () fixed on the rotating member () and having a vacuum passage which is formed therein and connected with the rotating joint (); a linear driving unit () including a guide rail () fixed on the base () and a sliding block () slidable along the guide rail (); a cantilever beam () disposed horizontally and defining a first end fixed with the sliding block () and a second end; a measuring head () connected to the second end of the cantilever beam (), facing a surface of the working table () and having an eddy current probe () disposed therein.