Tsinghua University

Hwatsing Technology Co., Ltd.

Dewen Zhao

Xinchun Lu

Yongyong He

Qian Zhao

Yonggang Meng

Pan Shen

Jianbin Luo

Tongqing Wang

Zhenjie Xu

Hegeng Mei

Lianqing Zhang

Zhaohui Pei

Zilian Qu

A device for globally measuring a thickness of a metal film (), comprises: a base (); a rotating unit () comprising a fixed member () fixed on the base () and a rotating member () having a rotating joint (); a working table () fixed on the rotating member () and having a vacuum passage which is formed therein and connected with the rotating joint (); a linear driving unit () including a guide rail () fixed on the base () and a sliding block () slidable along the guide rail (); a cantilever beam () disposed horizontally and defining a first end fixed with the sliding block () and a second end; a measuring head () connected to the second end of the cantilever beam (), facing a surface of the working table () and having an eddy current probe () disposed therein.

Device for globally measuring thickness of metal film

A chemical-mechanical polishing machine includes a work table, polishing platen mounted onto the work table, pad conditioner and slurry-delivery device mounted on the work table and disposed near the polishing platen, and polishing-head support mounted on the work table and including a base plate and supporting side plates. The base plate is formed with a groove in a 'thickness' direction. A loading and unloading table is mounted on the work table, disposed below the base plate, and opposed to the polishing platen. A polishing head is rotatably disposed on the polishing-head support, movable in the longitudinal direction, and passes through the groove to extend downwardly. A robotic manipulator is disposed near the work table for placing a wafer on the loading and unloading table and taking the wafer away from it. A chemical-mechanical polishing apparatus includes an array of a plurality of the machine.

Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same

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Beijing, China

Dewen Zhao