Company Filing History:
Years Active: 2001-2005
Title: **Devendra Kumar: Innovator in Semiconductor Technology**
Introduction
Devendra Kumar is a distinguished inventor located in Los Altos, California. With an impressive portfolio that includes five patents, Kumar has made significant contributions to the field of semiconductor technology. His innovations have paved the way for advancements in manufacturing processes and materials used in electronic devices.
Latest Patents
Among his latest patents, Devendra Kumar has developed groundbreaking methods for manufacturing semiconductor devices with enhanced performance characteristics. One notable patent is for a method that involves a series of precise steps: firstly, a sacrificial layer made from an organic polymer, such as benzocyclobutene, is deposited on a substrate with a pre-formed circuit. The sacrificial layer is then selectively etched to create areas for air gaps. A low-dielectric layer is subsequently deposited over the substrate to encapsulate these air gaps completely. Following this, etching is performed to create via holes and trenches, with the air gap portion removed either before or after etching. Finally, copper is deposited into these troughs, facilitating strong connections between elements on the substrate.
Another significant patent relates to the formation of an insulation film on semiconductor substrates. This process employs a silicon-containing hydrocarbon compound that is vaporized to produce a source gas. The introduction of a reaction gas, composed of both the source gas and additional inert and oxidizing gases, initiates a reaction in a plasma CVD apparatus. Through careful control of the reaction conditions, Kumar's method allows for the creation of siloxan polymer films with low dielectric constants, enhancing insulation properties in semiconductor devices.
Career Highlights
Throughout his career, Devendra Kumar has worked with leading companies in the semiconductor industry. Notable employers include FSI International, Inc. and ASM Japan K.K., where he honed his skills and contributed to several key projects that advanced semiconductor technology.
Collaborations
In addition to his personal achievements, Kumar has collaborated with esteemed colleagues such as Jeffrey D. Womack and Vuong P. Nguyen. These partnerships have led to fruitful exchanges of ideas and advancements in their joint projects, further contributing to the semiconductor field.
Conclusion
Devendra Kumar's contributions to semiconductor technology reflect his commitment to innovation and excellence. His patents not only advance manufacturing techniques but also play a crucial role in the development of next-generation electronics. As a prominent inventor, Kumar continues to influence the industry with his groundbreaking work, solidifying his legacy in the world of technology.