Deven Matthew Raj Mittal

Title: The Innovative Mind of Deven Matthew Raj Mittal

Introduction

Deven Matthew Raj Mittal, a talented inventor based in Middleton, MA, has made significant contributions to the field of memory device manufacturing. With a remarkable portfolio of 6 patents, he has developed advanced methods that enhance the quality of silicon-containing dielectric layers crucial for modern electronic devices.

Latest Patents

Among his latest innovations, Mittal has developed methods for **Sequential Plasma and Thermal Treatment**, which improve the quality of a selectively deposited silicon-containing dielectric layer. This method involves selectively depositing the dielectric layer in a recessed region of a film stack, followed by exposure to high-density plasma and annealing at temperatures exceeding 800 °C. As a result, he has successfully achieved a silicon-containing dielectric film with a wet etch rate of less than 4 Å/min.

Another noteworthy patent is for **Highly Etch Selective Amorphous Carbon Film**. This innovation outlines methods and techniques for depositing amorphous carbon films on a substrate. The process includes depositing the film on an underlayer and implanting dopants or inert species into the amorphous carbon film. The chosen implant species, along with energy, dose, and temperature adjustments, enhance the hardness of the hardmask, allowing for effective patterning and etching of the underlayer.

Career Highlights

Deven works at Applied Materials, Inc., where he continues to innovate in the realm of semiconductor manufacturing. His role has allowed him to push the boundaries of technology, contributing to the advancement of memory devices.

Collaborations

In his career, Mittal has collaborated with notable coworkers such as Prashant Kumar Kulshreshtha and Rajesh Prasad. These partnerships have facilitated the exchange of ideas and fostered an environment of creativity and innovation within the team.

Conclusion

Deven Matthew Raj Mittal's contributions to the field of memory device manufacturing through his inventive methods and techniques showcase his expertise and dedication to innovation. As he continues to develop new technologies at Applied Materials, Inc., the impact of his work will undoubtedly resonate within the electronics industry for years to come.