Location History:
- San Antonio, TX (US) (1999 - 2002)
- Bexar, TX (US) (2002)
Company Filing History:
Years Active: 1999-2002
Title: Delbert H Parks: Innovator in Semiconductor Technology
Introduction
Delbert H Parks, residing in San Antonio, Texas, is a notable inventor recognized for his contributions to the semiconductor industry. With a total of five patents to his name, his innovative methods have significantly improved the efficiency and effectiveness of semiconductor processes.
Latest Patents
Among his latest patents, Delbert devised a "Method for Reducing Semiconductor Contact Resistance." This method addresses the critical issue of contact resistances in semiconductors by utilizing fluorocarbon plasmas during high-selectivity sub-quarter-micron contact hole etching. His innovative process applies high etch selective chemistry to first remove silicon dioxide (SiO) before switching to a different chemistry that selectively etches silicon nitride (SiN) to silicide (TiSi) layers. Delbert's research revealed that polymerization effects are crucial in this etching process, leading to the creation of reactive unsaturated polymers that adhere to contact sidewalls and bottoms. Additionally, he explored various polymer removal methods to restore etch selectivity, making his findings applicable to a wide range of highly selective etching applications.
Another significant patent is the "Method for Cleaning Integrated Circuit Bonding Pads," which introduces a cleaning technique that involves treating bonding pads on semiconductor devices with a combination of carbon fluoride (CF) and water vapor. This innovative approach successfully creates a volatile HF vapor that facilitates the removal of fluorine residue on bonding pad surfaces, enhancing the reliability of bond wire connections.
Career Highlights
Delbert has had an impressive career, working with prominent companies in the technology sector, including VLSI Technology, Inc. and Philips Electronics Ltd. His work at these institutions has enabled him to contribute significantly to advancements in semiconductor technology.
Collaborations
Throughout his career, Delbert has collaborated with notable colleagues such as Mark W Haley and Victor Ku. These partnerships have likely fostered a rich environment for innovation and knowledge exchange, further enhancing his contributions to the field.
Conclusion
Delbert H Parks continues to be a vital player in the semiconductor domain, with his inventive methodologies and collaborative spirit driving forward the technology of microelectronics. His patents not only highlight his ingenuity but also offer solutions to pressing challenges in the semiconductor industry, cementing his legacy as an influential inventor.