The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1999
Filed:
Jul. 25, 1996
Applicant:
Inventors:
Michela S Love, San Antonio, TX (US);
Delbert H Parks, San Antonio, TX (US);
Assignee:
VLSI Technology, Inc., San Jose, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438131 ; 438467 ; 438530 ; 438351 ;
Abstract
An antifuse structure is formed between two metal contacts in which a thin oxide layer is formed on the first or bottom metal, a shallow via is provided oxide layer and a layer of amorphous silicon is deposited over the thin oxide and into the shallow via without leaving the usual furrows in the amorphous silicon and thereby eliminating the step coverage problems of cusps forming in the subsequently applied second or top metal.