Boise, ID, United States of America

Deepak Vedhachalam

USPTO Granted Patents = 3 

Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 43(Granted Patents)


Company Filing History:


Years Active: 2019-2022

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3 patents (USPTO):Explore Patents

Title: The Innovations of Deepak Vedhachalam

Introduction

Deepak Vedhachalam is a prominent inventor based in Boise, ID, recognized for his significant contributions to technology through his innovative patents. With a total of three patents to his name, Deepak has made strides in the field of dry etching processes. His work aims to enhance and streamline manufacturing processes within the semiconductor industry.

Latest Patents

Deepak's latest patents revolve around the control of dry etch process characteristics using waferless dry clean optical emission spectroscopy. These patents describe advanced architectures, platforms, and methods for acquiring optical emission spectra from an optical emission spectroscopy system. This is achieved by introducing a dry cleaning gas into a plasma processing chamber of the plasma processing system and igniting a plasma to initiate the waferless dry cleaning process. His innovation presents a breakthrough approach to improving semiconductor manufacturing efficiency and accuracy.

Career Highlights

Deepak is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing field. His work at Tokyo Electron Limited places him at the forefront of technological advancements, directly contributing to the evolution of process control in semiconductor fabrication. His dedication to research and innovation has been pivotal in enhancing the operational capabilities of his organization.

Collaborations

Deepak has collaborated with notable colleagues, including Brian J Coppa and Francois Chandrasekar Dassapa. These collaborations have fostered an environment of creativity and support, leading to fruitful innovations and shared advancements in their respective fields.

Conclusion

In conclusion, Deepak Vedhachalam exemplifies the spirit of innovation in the semiconductor industry. His patents not only reflect his expertise but also underscore the importance of collaboration in driving technological progress. As he continues his journey at Tokyo Electron Limited, Deepak remains a crucial player in shaping the future of semiconductor manufacturing.

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