Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (3 from 10,295 patents)
3 patents:
1. 11273469 - Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
2. 10773282 - Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
3. 10436717 - Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process