David Tao

Title: David Tao: Innovator in Ion Beam Control and Thermal Processing

Introduction

David Tao is a prominent inventor based in Saugus, MA (US), known for his contributions to the field of semiconductor technology. With a total of 4 patents to his name, he has made significant advancements in ion beam control and thermal processing systems.

Latest Patents

One of David's latest patents is titled "System and method of ion beam control in response to a beam glitch." This invention focuses on a switch circuit and method designed to quickly enable or disable the ion beam to a wafer within an ion implantation system. The technique aims to enhance wafer doping repaint and reduce duty factors. The circuit is capable of quenching arcs that may form between high voltage electrodes, thereby shortening the duration of the arc and mitigating non-uniform ion implantations. This innovation facilitates repainting the ion beam over areas affected by arcing to recover dose loss.

Another notable patent is "Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling." This invention pertains to a semiconductor thermal processing system that includes a segmented cold plate within a process chamber. The cold plate's segments can radially translate between engaged and disengaged positions, allowing a substrate holder to pass through when disengaged. The system also features an elevator that translates the substrate between heating and cooling positions, with temperature sensors providing feedback for optimal cooling.

Career Highlights

David Tao has established himself as a key figure in the semiconductor industry through his innovative work at Axcelis Technologies, Inc. His expertise in ion beam technology and thermal processing has positioned him as a valuable asset in advancing semiconductor manufacturing processes.

Collaborations

Throughout his career, David has collaborated with notable colleagues, including Douglas A Brown and Mathias Koch. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

David Tao's contributions to ion beam control and thermal processing exemplify his commitment to innovation in semiconductor technology. His patents reflect a deep understanding of the challenges in the industry and a dedication to finding effective solutions.