Daniel Le

Title: **The Innovations of Daniel Le: Pioneering Atomic Layer Etching**

Introduction

Daniel Le is a notable inventor based in Santa Clara, CA, who has made significant contributions to the field of semiconductor manufacturing. With four patents to his name, his innovative work primarily focuses on atomic layer etching, advancing the precision and efficiency of materials used in semiconductor devices.

Latest Patents

Daniel Le's latest patents embody groundbreaking methods crucial for the etching processes in semiconductor fabrication. One of his patents is titled **"Atomic Layer Etching of Silicon Nitride"**, which describes a method for selectively etching silicon nitride concerning silicon dioxide or silicon-germanium structures. This method employs a sequence of cycles in atomic layer etching, involving a fluorinated polymer deposition phase and an activation phase to achieve fine selective etching.

Another significant patent is the **"Hydrogen Activated Atomic Layer Etching"**, which also aims to selectively etch silicon dioxide and silicon nitride with respect to silicon-germanium or silicon substrates. This advanced technique integrates a fluorinated polymer deposition followed by an activation phase involving an inert bombardment gas and hydrogen, allowing for precise control over the etching process.

Career Highlights

Throughout his career, Daniel has been associated with Lam Research Corporation, a frontrunner in the field of semiconductor equipment manufacturing. His work has garnered recognition for its innovative approach and technical depth, reflecting his commitment to advancing semiconductor technologies.

Collaborations

Daniel has collaborated with prominent colleagues such as Gerardo Delgadino and Xin Zhang. Together, they have contributed to the development of advanced etching techniques and have worked towards enhancing the capabilities of semiconductor manufacturing.

Conclusion

With his impressive portfolio of patents and innovative contributions, Daniel Le exemplifies the spirit of invention in the semiconductor industry. His work at Lam Research Corporation continues to influence how materials are processed in the technology sector, paving the way for advancements that sustain the growth of modern electronics.