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Years Active: 2015-2020
Title: Daigo Yamaguchi: Innovator in Semiconductor Technology
Introduction
Daigo Yamaguchi is a prominent inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods for manufacturing semiconductor devices and processing substrates.
Latest Patents
Yamaguchi's latest patents include a method of manufacturing a semiconductor device and a substrate processing apparatus. One of his techniques involves providing a substrate with a film containing a predetermined element, oxygen, and carbon. This method modifies the surface of the film by supplying a carbon-free fluorine-based gas under conditions that prevent etching of the film. Another patent details a process where a film containing a prescribed element and carbon is formed on a substrate through a series of cycles. This cycle includes supplying an organic-based source and a pseudo catalyst into a process chamber, maintaining confinement, and exhausting the chamber's interior.
Career Highlights
Throughout his career, Daigo Yamaguchi has worked with notable companies such as Hitachi Kokusai Electric Inc. and Kokusai Electric Corporation. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.
Collaborations
Yamaguchi has collaborated with esteemed colleagues, including Tsukasa Kamakura and Tsuyoshi Takeda. Their combined expertise has contributed to advancements in semiconductor technology.
Conclusion
Daigo Yamaguchi's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of semiconductor manufacturing.