logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9831083 B1

PDFFull Text
Date of Patent:
Nov. 28, 2017

Filed:

Sep. 27, 2013

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

Applicant:

Hitachi Kokusai Electric Inc., Tokyo, JP;

Inventors:

Daigo Yamaguchi, Toyama, JP;

Tsukasa Kamakura, Toyama, JP;

Hiroshi Ashihara, Toyama, JP;

Tsuyoshi Takeda, Toyama, JP;

Taketoshi Sato, Toyama, JP;

Assignee:

HITACHI KOKUSAI ELECTRIC INC., Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Charles Garber

Assistant Examiner:

Abdulfattah Mustapha

Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 21/02 (2006.01); C23C 16/30 (2006.01); C23C 16/32 (2006.01); C23C 16/36 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02271 (2013.01); C23C 16/30 (2013.01); C23C 16/308 (2013.01); C23C 16/325 (2013.01); C23C 16/36 (2013.01); C23C 16/44 (2013.01); C23C 16/4412 (2013.01); C23C 16/45523 (2013.01); C23C 16/52 (2013.01); H01L 21/0217 (2013.01); H01L 21/02126 (2013.01); H01L 21/02167 (2013.01); H01L 21/02172 (2013.01); H01L 21/02211 (2013.01); H01L 21/02277 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01); H01L 21/76829 (2013.01);
Abstract

A film containing a prescribed element and carbon is formed on a substrate, by performing a cycle a prescribed number of times, the cycle including: supplying an organic-based source containing a prescribed element and a pseudo catalyst including at least one selected from the group including a halogen compound and a boron compound, into a process chamber in which the substrate is housed, and confining the organic-based source and the pseudo catalyst in the process chamber; maintaining a state in which the organic-based source and the pseudo catalyst are confined in the process chamber; and exhausting an inside of the process chamber.

Find Patent Forward Citations

Loading…