Daehan Choi

Title: Daehan Choi: Innovator in Semiconductor Technology

Introduction

Daehan Choi is a prominent inventor based in Sunnyvale, CA, known for his contributions to semiconductor technology. With a total of 4 patents, he has made significant advancements in the field, particularly in etching methods that enhance the manufacturing process of semiconductor devices.

Latest Patents

One of Daehan Choi's latest patents is the "Infinitely Selective Photoresist Mask Etch." This innovative method allows for etching features into an etch layer beneath a photoresist mask without the need for an intermediate hardmask. The process involves multiple etch cycles, each consisting of a deposition etch phase that etches features and deposits polymer on the sidewalls, followed by a cleaning phase that removes the deposited polymer.

Another notable patent is the "Self-Aligned Pitch Reduction." This method provides features in a dielectric layer by forming a sacrificial layer over it. A set of sacrificial layer features is etched, followed by etching a first set of dielectric layer features through the sacrificial layer. The process includes filling these features with a filler material, removing the sacrificial layer, and shrinking the widths of the spaces between the filler material parts through a shrink sidewall deposition. Finally, a second set of dielectric layer features is etched, and the filler material along with the shrink sidewall deposition is removed.

Career Highlights

Daehan Choi is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced etching techniques that are crucial for the production of high-performance semiconductor devices.

Collaborations

Throughout his career, Daehan has collaborated with notable colleagues, including S M Reza Sadjadi and Ji Soo Kim. These collaborations have contributed to the innovative solutions he has developed in the semiconductor field.

Conclusion

Daehan Choi's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the industry. His advancements in etching methods are paving the way for more efficient semiconductor manufacturing processes.