Company Filing History:
Years Active: 2006
Title: Curt D. Bergeron: Innovator in Ion Source Technology
Introduction
Curt D. Bergeron is a notable inventor based in Danvers, MA (US), recognized for his contributions to ion source technology. He holds 2 patents that showcase his innovative approach to enhancing the functionality of ion implanters.
Latest Patents
One of his latest patents is for an "Indirectly Heated Cathode Ion Source." This invention features an arc chamber housing that defines an arc chamber, an indirectly heated cathode, and a filament for heating the cathode. The cathode includes an emitting portion with a front surface, a rear surface, and a periphery, along with a support rod attached to the rear surface and a skirt extending from the periphery. The cathode assembly integrates the cathode, filament, and a clamp assembly to maintain a fixed spatial relationship while conducting electrical energy. Additionally, the ion source incorporates a shield to inhibit the escape of electrons and plasma from the arc chamber.
Another significant patent is the "Gas Flow Restricting Cathode System for Ion Implanter and Related Method." This system features a cathode element that extends through an aperture in the wall of an arc chamber of an ion implanter. A restriction member is used to limit gas flow through the spacing between the cathode element and the aperture. This invention also includes a method for ionizing a source gas and a cathode element that incorporates the restriction member.
Career Highlights
Curt D. Bergeron is currently employed at Varian Semiconductor Equipment Associates, Inc., where he applies his expertise in developing advanced ion source technologies. His work has significantly impacted the field of semiconductor manufacturing.
Collaborations
Throughout his career, Curt has collaborated with notable colleagues, including Joseph C. Olson and Peter E. Maciejowski. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Curt D. Bergeron is a distinguished inventor whose work in ion source technology has led to significant advancements in the industry. His patents reflect a commitment to innovation and excellence in engineering.