Company Filing History:
Years Active: 2002-2005
Title: Innovations of Clay C. Titus
Introduction
Clay C. Titus is a notable inventor based in San Diego, CA. He has made significant contributions to the field of laser technology, particularly in the development of excimer lasers. With a total of 2 patents, his work has had a profound impact on integrated circuit lithography.
Latest Patents
One of his latest patents is the "Four KHz gas discharge laser system." This invention provides an excimer laser capable of producing a high-quality pulsed laser beam at pulse rates of about 4,000 Hz, with pulse energies of about 5 mJ or greater. A preferred embodiment of this invention is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. The system includes an improved wavemeter with special software that monitors output beam parameters and controls a very fast PZT-driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. Additionally, the design features two fan motors that drive a single tangential fan, providing sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.
Another significant patent is the "Line narrowing unit with flexural grating mount." This invention further enhances the capabilities of laser systems, contributing to the precision required in various applications.
Career Highlights
Clay C. Titus is currently associated with Cymer, Inc., a company known for its advancements in photolithography technology. His work at Cymer has positioned him as a key player in the development of cutting-edge laser systems.
Collaborations
Throughout his career, Clay has collaborated with notable colleagues, including John Martin Algots and Raymond F. Cybulski. These collaborations have fostered innovation and have been instrumental in the success of various projects.
Conclusion
Clay C. Titus is a distinguished inventor whose contributions to laser technology have significantly advanced the field of integrated circuit lithography. His innovative patents and work at Cymer, Inc. continue to influence the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.