Company Filing History:
Years Active: 2015
Title: The Innovations of Claus Zahlten
Introduction
Claus Zahlten is a notable inventor based in Heidelberg, Germany. He has made significant contributions to the field of microlithography through his innovative patent. His work focuses on imaging optics and projection exposure installations, which are crucial for advanced manufacturing processes.
Latest Patents
Zahlten holds a patent for imaging optics and projection exposure installations for microlithography. This patent describes an imaging optics system that includes a first mirror in the imaging beam path after the object field, a last mirror before the image field, and a fourth to last mirror in the imaging beam path. The design features an unfolded imaging beam path between the object plane and the image plane, where the impingement point of the chief ray on each mirror has a specific spacing from the image plane. Notably, the mirror spacing of the first mirror is greater than that of the last mirror, and the fourth to last mirror has a spacing greater than the first mirror. This configuration allows for chief rays emanating from spaced points in the object field to have a mutually diverging beam course, resulting in a negative back focus of the entrance pupil.
Career Highlights
Zahlten is associated with Carl Zeiss SMT GmbH, a leading company in optical systems and technologies. His work at this esteemed organization has allowed him to push the boundaries of imaging technology and contribute to advancements in the field.
Collaborations
Throughout his career, Claus Zahlten has collaborated with notable colleagues, including Hans-Juergen Mann and Johannes Zellner. These partnerships have fostered innovation and have been instrumental in the development of cutting-edge technologies in microlithography.
Conclusion
Claus Zahlten's contributions to imaging optics and microlithography exemplify the spirit of innovation in the field. His patent reflects a deep understanding of optical systems and their applications in modern technology. Zahlten's work continues to influence advancements in the industry, showcasing the importance of inventive minds in shaping the future.