The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Sep. 20, 2011
Hans-juergen Mann, Oberkochen, DE;
Johannes Zellner, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Claus Zahlten, Heidelberg, DE;
Christoph Menke, Oberkochen, DE;
Marco Pretorius, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Hans-juergen Rostalski, Oberkochen, DE;
Hans-Juergen Mann, Oberkochen, DE;
Johannes Zellner, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Claus Zahlten, Heidelberg, DE;
Christoph Menke, Oberkochen, DE;
Marco Pretorius, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Hans-Juergen Rostalski, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
Imaging optics includes a first mirror in the imaging beam path after the object field, a last mirror in the imaging beam path before the image field, and a fourth to last mirror in the imaging beam path before the image field. In an unfolded imaging beam path between the object plane and the image plane, an impingement point of the chief ray on a used region of each of the plurality of mirrors has a mirror spacing from the image plane. The mirror spacing of the first mirror is greater than the mirror spacing of the last mirror. The mirror spacing of the fourth to last mirror is greater than the mirror spacing of the first mirror. Chief rays that emanate from points of the object field that are spaced apart from another have a mutually diverging beam course, giving a negative back focus of the entrance pupil.