Carl Zeiss Smt Gmbh

Claus Zahlten

Wilhelm Ulrich

Hans-Juergen Mann

Aurelian Dodoc

Hans-Juergen Rostalski

Marco Pretorius

Christoph Menke

Johannes Zellner

Imaging optics includes a first mirror in the imaging beam path after the object field, a last mirror in the imaging beam path before the image field, and a fourth to last mirror in the imaging beam path before the image field. In an unfolded imaging beam path between the object plane and the image plane, an impingement point of the chief ray on a used region of each of the plurality of mirrors has a mirror spacing from the image plane. The mirror spacing of the first mirror is greater than the mirror spacing of the last mirror. The mirror spacing of the fourth to last mirror is greater than the mirror spacing of the first mirror. Chief rays that emanate from points of the object field that are spaced apart from another have a mutually diverging beam course, giving a negative back focus of the entrance pupil.

Imaging optics and projection exposure installation for microlithography with an imaging optics

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Heidelberg, Germany

Claus Zahlten