Chung-Yi Chen

Title: Innovations of Chung-Yi Chen in Semiconductor Technology

Introduction

Chung-Yi Chen is a notable inventor based in Taipei Hsien, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for forming embedded memory and improving threshold voltage stability in MOS transistors. With a total of 2 patents to his name, his work has had a considerable impact on the industry.

Latest Patents

Chung-Yi Chen's latest patents include a method of forming an embedded memory that involves the sequential formation of three silicon or polysilicon layers. This innovative process begins with a substrate defined by a first and second region. An ONO layer, a first silicon layer, and a silicon nitride layer are formed on the substrate. The layers on the second region are then removed, allowing for the formation of a gate oxide layer and the deposition of a second silicon layer. Following this, a photo-etching process is executed to remove the second silicon layer and the silicon nitride layer on the first region, culminating in the formation of a third silicon layer and the creation of MOS transistors.

Another significant patent focuses on a method of forming a MOS transistor with improved threshold voltage stability. In this process, the gate of at least one transistor is formed on the semiconductor substrate's surface. The gate serves as a mask for creating a lightly doped drain. A low thermal budget deposition process is utilized to form a silicon nitride layer, followed by an ion implantation process to implant fluorine atoms into the layer. This innovative approach enhances the threshold voltage stability of the transistor by preventing interface trapped charges.

Career Highlights

Chung-Yi Chen has worked with prominent companies in the semiconductor industry, including Ememory Technology Inc. and United Microelectronics Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Chung-Yi Chen has collaborated with esteemed colleagues such as Jih-Wen Chou and Chih-Hsun Chu. These partnerships have fostered an environment of innovation and have led to the successful development of new technologies.

Conclusion

Chung-Yi Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the field. His innovative methods continue to influence the industry and pave the way for