Chung-Jen Chen

Title: Innovations of Chung-Jen Chen

Introduction

Chung-Jen Chen is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor processing, holding two patents that showcase his innovative approach to overcoming challenges in this industry.

Latest Patents

Chung-Jen Chen's latest patents include a method to avoid a laser marked area step height. This invention involves a semiconductor process wafer that has substantially co-planar active areas and a laser marked area in an adjacent inactive area. The method aims to eliminate a step height and improve a subsequent patterning process over the active areas. An inactive area trench is formed overlying the laser marked area in parallel with the formation of STI trenches in the active area, ensuring that both areas are formed substantially co-planar without a step height.

Another significant patent is focused on photoresist removal from alignment marks through wafer edge exposure. This process involves removing photoresist from alignment marks on a semiconductor wafer using a wafer edge exposure technique. The alignment marks, which are covered by photoresist during semiconductor processing, are revealed by exposing parts of the wafer's edge. This innovative approach allows for subsequent layers to be deposited by aligning them using the revealed alignment marks, without the need for a photolithographic clear out process.

Career Highlights

Chung-Jen Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to contribute to advancements in semiconductor technology. His work has been instrumental in improving processes that are critical to the efficiency and effectiveness of semiconductor manufacturing.

Collaborations

Chung-Jen Chen has collaborated with notable colleagues such as Chin-Kun Fang and Kun-Pi Cheng. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Chung-Jen Chen's contributions to semiconductor processing through his patents demonstrate his commitment to innovation and excellence in his field. His work not only addresses current challenges but also paves the way for future advancements in technology.