Chung-Geun Koh

Title: Innovations of Chung-Geun Koh in Semiconductor Manufacturing

Introduction

Chung-Geun Koh is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. His work focuses on innovative methods that enhance the efficiency and performance of semiconductor devices.

Latest Patents

One of his latest patents is titled "Method of manufacturing semiconductor device using stress memorization technique." This patent describes a process that includes providing a substrate supporting a gate electrode, amorphizing and doping the source/drain regions located on both sides of the gate electrode through a pre-amorphization implant (PAI) process. It also involves implanting carbon (C) or nitrogen (N) into the source/drain regions, forming a stress-inducing layer on the substrate, and recrystallizing the source/drain regions by annealing the substrate. The stress-inducing layer may then be removed, and the C or N may be implanted into the entirety of the source/drain regions after they have been amorphized, or only into the upper portions of the amorphized regions.

Another significant patent is the "Method for manufacturing semiconductor device." This invention outlines a semiconductor device formed with a gate pattern on a substrate, featuring a recrystallized region with a stacking fault defect at one side of the gate pattern. This design aims to reduce leakage current and improve channel conductivity, showcasing Koh's innovative approach to semiconductor technology.

Career Highlights

Chung-Geun Koh has worked with leading companies in the semiconductor industry, including Samsung Electronics Co., Ltd. and Siltron, Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.

Collaborations

Throughout his career, Koh has collaborated with notable colleagues such as Seok-Hoon Kim and Kwan-Yong Lim. These partnerships have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.

Conclusion

Chung-Geun Koh's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his significant role in advancing technology in this field. His work continues to influence the development of more efficient and effective semiconductor devices.