Location History:
- Cambridge, MA (US) (2022 - 2023)
- Somerville, MA (US) (2023)
Company Filing History:
Years Active: 2022-2023
Title: Innovations by Chun Wang Chan
Introduction
Chun Wang Chan is a notable inventor based in Cambridge, MA, who has made significant contributions to the field of electrostatic chucks. With a total of five patents to his name, Chan's work focuses on enhancing the efficiency and functionality of devices used in workpiece processing.
Latest Patents
Among his latest patents are two innovative designs: the "Electrostatic chuck having a gas flow feature" and the "Electrostatic chuck with charge dissipation coating." The first patent describes electrostatic chucks designed to support a workpiece during processing, incorporating a gas flow system to improve performance. The second patent addresses the issue of wafer sticking by providing conductive paths on raised embossments connected to ground, which support the wafer substrate. This design reduces electrical coupling during wafer clamping and ensures a low resistance path for charges remaining on the wafer after declamping.
Career Highlights
Chun Wang Chan is currently employed at Entegris, Inc., where he continues to innovate in the field of electrostatic chucks. His work has been instrumental in advancing technologies that enhance the manufacturing processes in various industries.
Collaborations
Chan collaborates with talented individuals such as Yan Liu and Jakub Rybczynski, contributing to a dynamic team focused on pushing the boundaries of technology.
Conclusion
Chun Wang Chan's contributions to the field of electrostatic chucks exemplify the impact of innovative thinking in technology. His patents reflect a commitment to solving complex problems in workpiece processing, making him a valuable asset in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.