Chun Lee

Title: Innovations of Inventor Chun Lee

Introduction

Chun Lee is a prominent inventor based in Cupertino, CA, known for her contributions to the field of electromagnetic beam conditioning and semiconductor technology. With a total of 2 patents, she has made significant advancements that enhance the performance and reliability of various technologies.

Latest Patents

One of her latest patents is titled "Beam conditioning to reduce spatial coherence." This invention describes methods and apparatus related to electromagnetic beam conditioning, particularly utilizing reflectors to temporally differentiate electromagnetic beam subsections. This process results in reduced spatial coherence of the beam, which is crucial for various applications. Another notable patent is the "Method and system for detecting phase defects in lithographic masks and semiconductor wafers." This invention provides apparatus and methods for detecting phase defects by relying on the distortion of light as it passes through defects in phase shift masks. The invention enhances signal detection through a multiple element detector configured to generate differential signals, ultimately aiding in the identification of phase defects.

Career Highlights

Chun Lee has worked with notable companies such as KLA-Tencor Technologies Corporation and KLA-Tencor Corporation. Her experience in these organizations has allowed her to develop and refine her innovative ideas, contributing to advancements in the semiconductor industry.

Collaborations

Throughout her career, Chun has collaborated with talented individuals, including Damon Floyd Kvamme and Stan Stokowski. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Chun Lee's contributions to the fields of electromagnetic beam conditioning and semiconductor technology highlight her role as a leading inventor. Her patents reflect her commitment to innovation and her impact on the industry.