The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Mar. 31, 2008
Applicants:
Damon Kvamme, Los Gatos, CA (US);
David Alles, Los Altos, CA (US);
Chun Lee, Cupertino, CA (US);
Wu Jiang, Sunnyvale, CA (US);
Inventors:
Damon Kvamme, Los Gatos, CA (US);
David Alles, Los Altos, CA (US);
Chun Lee, Cupertino, CA (US);
Wu Jiang, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/122 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and apparatus relating to electromagnetic beam (e.g., laser beam) conditioning are described. In an embodiment, electromagnetic beam conditioning may be performed utilizing reflectors to temporally differentiate electromagnetic beam subsections and sub-beams resulting in reduced spatial coherence of the beam. Other embodiments are also described.