Chun-Chieh Kuo

Title: Innovations of Chun-Chieh Kuo

Introduction

Chun-Chieh Kuo is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of photolithography, particularly in the development of compact modeling techniques. With a total of seven patents to his name, Kuo's work has advanced the understanding and application of lithographic processes in the semiconductor industry.

Latest Patents

Kuo's latest patents include innovative methods for improving photolithography models. One notable patent is focused on compact modeling for negative tone development processes. This model modifies the image output intensity of a point along a two-dimensional plane based on a gradient of a convolution of a mask value and a selected sampling pattern function. The sampling pattern function is divided into two subsets, which include nodes and antinodes, allowing for precise scaling of the convolution gradients.

Another significant patent describes a system and technique for modeling resist profile change sensitivity at different heights. This method involves calibrating a compact model for a lithographic process by separating input energy effects from chemical effects. The resulting energy-sensitive compact model can quickly construct three-dimensional resist profiles, capturing degradation at any horizontal plane. This innovative approach can be seamlessly integrated into existing validation and correction processes.

Career Highlights

Chun-Chieh Kuo is currently employed at Synopsys, Inc., a leading company in electronic design automation. His work at Synopsys has positioned him as a key player in advancing lithographic technologies. Kuo's expertise in compact modeling has made a significant impact on the efficiency and accuracy of semiconductor manufacturing processes.

Collaborations

Kuo has collaborated with notable colleagues, including Jensheng Huang and Lawrence S. Melvin, III. These collaborations have further enriched his research and development efforts in the field of photolithography.

Conclusion

Chun-Chieh Kuo's contributions to the field of photolithography through his innovative patents and work at Synopsys, Inc. highlight his importance as an inventor. His advancements in compact modeling techniques continue to influence the semiconductor industry and pave the way for future innovations.