This inventor holds 25 USPTO granted patents and 2 published patent applications, primarily in Gas-Based Substrate Processing. Top assignees: Novellus Systems Incorporated, Lam Research Corporation, Qume Corporation. Active years: 1986-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- San Jose, CA (US) (1986 - 1999)
- Los Gatos, CA (US) (1997 - 2024)
Company Filing History:
15 out of 993 
7 out of 3,953 
1 out of 32 
Years Active: 1986-2025
Areas of Expertise:
Title: Innovations of Christopher William Burkhart in Autonomous Guided Vehicles and Semiconductor Processing
Introduction
Christopher William Burkhart, based in Los Gatos, CA, is an accomplished inventor with a remarkable portfolio of 24 patents. His work predominantly focuses on advancements in autonomous guided vehicles and semiconductor processing technologies.
Latest Patents
Among his latest contributions, Burkhart has developed a dual-mode autonomous guided vehicle. This innovative vehicle is designed for docking modules within a fabrication bay, featuring a chassis that supports the module, drive means for autonomous transport, and sophisticated movement capabilities in both x-y and z directions. Another notable invention is the moving substrate transfer chamber, a processing tool tailored to facilitate the handling of semiconductor substrates through a series of process modules, optimized by a vacuum transfer module equipped with a robot for efficient access.
Career Highlights
Burkhart's extensive career includes significant roles at leading technology companies such as Novellus Systems Incorporated and Lam Research Corporation. His expertise in semiconductor processing and automation technologies underscores his influential presence in the field.
Collaborations
Throughout his career, Christopher has collaborated with other distinguished professionals, including Everhardus P. van de Ven and Eliot K. Broadbent. These partnerships have enriched his work and contributed to the successful development of groundbreaking innovations.
Conclusion
Christopher William Burkhart's contributions to technology through his patents reflect a dedicated commitment to innovation. His advancements in autonomous systems and semiconductor processing continue to shape the industry, establishing him as a prominent figure in the world of inventions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile