The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Jan. 07, 2019
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Christopher William Burkhart, Los Gatos, CA (US);

Andrew C. Lee, Daly City, CA (US);

David J. Hemker, San Jose, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16L 25/00 (2006.01); H01L 21/67 (2006.01); B33Y 10/00 (2015.01); B22F 7/04 (2006.01); F16L 9/00 (2006.01); F16L 13/00 (2006.01); F16L 47/14 (2006.01); F16L 3/00 (2006.01); F16L 51/02 (2006.01); F16L 23/14 (2006.01); F16L 43/00 (2006.01); F16L 41/02 (2006.01); F16K 11/00 (2006.01); H01J 37/32 (2006.01); B01F 15/04 (2006.01); F16K 27/00 (2006.01); C23C 16/455 (2006.01); B33Y 80/00 (2015.01); B22F 3/00 (2006.01); B22F 3/105 (2006.01);
U.S. Cl.
CPC ...
F16L 25/0009 (2013.01); B01F 15/0429 (2013.01); B01F 15/0479 (2013.01); B22F 7/04 (2013.01); B33Y 10/00 (2014.12); C23C 16/45561 (2013.01); F16K 19/00 (2013.01); F16K 27/003 (2013.01); F16L 3/006 (2013.01); F16L 9/003 (2013.01); F16L 13/002 (2013.01); F16L 23/14 (2013.01); F16L 41/025 (2013.01); F16L 43/003 (2013.01); F16L 47/145 (2013.01); F16L 51/021 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); B22F 3/008 (2013.01); B22F 3/1055 (2013.01); B29K 2995/0006 (2013.01); B33Y 80/00 (2014.12); H05B 2203/021 (2013.01); Y02P 10/295 (2015.11); Y10T 137/6606 (2015.04); Y10T 137/87571 (2015.04); Y10T 137/87676 (2015.04); Y10T 137/87684 (2015.04);
Abstract

Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.


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