Company Filing History:
Years Active: 2018-2022
Title: Innovations by Inventor Christian Grasse
Introduction: Christian Grasse is a notable inventor based in Garching, Germany, with a focus on advancements in optical technologies. With two patents to his name, he has contributed significantly to the field of extreme ultraviolet (EUV) lithography, showcasing his expertise and innovative mindset.
Latest Patents: Christian Grasse's latest patents include a method for treating reflective optical elements specifically designed for the EUV wavelength range. This method entails treating a reflective optical element that features a reflective coating on a substrate. The innovative process involves irradiating the reflective optical element with at least one radiation pulse from a radiation source for a duration ranging between 1 microsecond and 1 second. Importantly, the reflective optical element and radiation source can move relative to one another, optimizing the overall treatment process. This method is particularly beneficial for applications in EUV lithography and inspection of masks and wafers.
Another notable patent by Grasse involves a reflective optical element that utilizes a multilayer system comprised of various partial stacks. Each stack consists of a first layer of one material and a second layer of another material, which differ in refractive index at the optical element's operating wavelength. The patent details specifications for the thickness and layer thickness ratio of the partial stacks, ensuring enhanced performance in optical systems used in microlithographic projection exposure apparatuses.
Career Highlights: Currently, Christian Grasse is affiliated with Carl Zeiss SMT GmbH, a leading company in optics and materials technology. His work at this organization places him at the forefront of cutting-edge technological advancements in the field of lithography.
Collaborations: Throughout his career, Grasse has collaborated with notable colleagues, including Joern Weber and Ralf Winter, who have contributed to his innovative endeavors in optical technologies. These partnerships have been instrumental in developing and refining his patentable ideas.
Conclusion: Christian Grasse stands out as a prominent inventor in the realm of optical technology, specifically in EUV lithography applications. His contributions through his patents demonstrate a commitment to innovation and improvement in the field, fostering advancements that have significant implications for future technological developments.