Location History:
- Nampa, ID (US) (2021 - 2022)
- Yokneam Ilit, IL (2023)
Company Filing History:
3 out of 533 
1 out of 832,891 Years Active: 2021-2023
Title: Chris Steely: Innovator in Semiconductor Technology
Introduction
Chris Steely is a notable inventor based in Nampa, ID (US), recognized for his contributions to semiconductor manufacturing. With a total of 4 patents, he has made significant advancements in overlay design and measurement techniques.
Latest Patents
One of his latest patents is titled "Overlay design for electron beam and scatterometry overlay measurements." This invention involves combined electron beam overlay and scatterometry overlay targets that include first and second periodic structures with gratings. The gratings in the second periodic structure can be positioned under or between the gratings of the first periodic structure. These overlay targets are essential for semiconductor manufacturing. Another significant patent is "Overlay mark design for electron beam overlay." This patent provides electron beam overlay targets and methods for performing overlay measurements using a semiconductor metrology tool. One target features a plurality of electron beam overlay elements and two-dimensional elements that allow for at least one two-dimensional imaging. The two-dimensional elements consist of an array of evenly spaced polygonal gratings across multiple rows and columns. Additionally, this patent includes targets with electron beam overlay elements and AIMid elements, each containing gratings overlaid at perpendicular orientations.
Career Highlights
Throughout his career, Chris has worked with Kla Corporation, where he has honed his skills in semiconductor technology. His innovative work has contributed to the advancement of measurement techniques in the industry.
Collaborations
Chris has collaborated with notable individuals such as Mark Ghinovker and Inna Steely-Tarshish, enhancing his work through shared expertise and insights.
Conclusion
Chris Steely's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively.