Chiu Chi

Title: Innovations of Inventor Chiu Chi

Introduction

Chiu Chi is a notable inventor based in San Jose, California, recognized for his contributions to semiconductor technology. He holds a total of six patents, showcasing his expertise in developing advanced materials and processes for the semiconductor industry.

Latest Patents

Chiu Chi's latest patents include methods of forming moisture barriers for low K film integration with anti-reflective layers. One of his significant innovations involves a nitrogen-free anti-reflective layer fabricated through a chemical vapor deposition process. This process, which can be plasma-enhanced, utilizes a gaseous mixture of carbon, silicon, and oxygen sources. By adjusting the process parameters, he achieves a substantially hermetic layer with acceptable values of the refractive index n and extinction coefficient k. The nitrogen-free moisture barrier anti-reflective layer produced by this technique enhances plasma etching of features such as vias in subsequent processing steps.

Career Highlights

Throughout his career, Chiu Chi has worked with prominent companies, including Novellus Systems Incorporated. His work has significantly impacted the semiconductor field, particularly in improving the efficiency and effectiveness of photolithography processes.

Collaborations

Chiu Chi has collaborated with notable professionals in the industry, including Scott Robert Summerfelt and Ming Chu Li. These collaborations have contributed to the advancement of semiconductor technologies and innovations.

Conclusion

Chiu Chi's innovative work in semiconductor technology and his six patents highlight his significant contributions to the field. His advancements in moisture barrier technologies continue to influence the industry positively.