This inventor holds 6 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2001-2004.
Location History:
- Kaoshiung, TW (2001)
- Kaohsiung, TW (2003)
- Tainan, TW (2003 - 2004)
Company Filing History:
Years Active: 2001-2004
Title: Innovations of Ching-Tien Ma in Semiconductor Technology
Introduction
Ching-Tien Ma is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving processes related to photolithography and via formation, which are critical in the manufacturing of integrated circuits.
Latest Patents
One of his latest patents is a method for forming via and contact holes with deep UV photoresist. This innovative method enhances the aspect ratios of via openings or contact holes by utilizing a deep UV photoresist. The process involves pre-treating the deep UV photoresist layer with UV radiation, which stabilizes the material and minimizes the formation of fluorocarbon polymers. This reduction is crucial as it prevents the coating of these polymers at the bottom of via openings, thereby ensuring a smoother etching process during the formation of vias or contacts.
Another notable patent by Ching-Tien Ma is a method for dual-damascene formation using a via plug. This method improves the photolithographic patterning process in a dual damascene process. It includes steps such as blanket depositing a photo-sensitive resinous layer, partially removing it to create a via plug, and photo-curing the plug to initiate a polymer cross-linking reaction. This innovative approach enhances the efficiency and effectiveness of the dual damascene process.
Career Highlights
Ching-Tien Ma is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to contribute to advancements in semiconductor manufacturing techniques.
Collaborations
Throughout his career, Ching-Tien Ma has collaborated with notable colleagues, including Tsung-Chuan Chen and Dian-Hau Chen. These collaborations have further enriched his research and development efforts in semiconductor technology.
Conclusion
Ching-Tien Ma's innovative contributions to semiconductor technology, particularly in the areas of via formation and photolithography, have established him as a key figure in the industry. His patents reflect a commitment to enhancing manufacturing processes, which is vital for the advancement of integrated circuit technology.