Company Filing History:
Years Active: 2003-2010
Title: Innovations of Ching-Te Lin in Semiconductor Technology
Introduction
Ching-Te Lin is a notable inventor based in Plano, TX, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, Lin's work focuses on enhancing the reliability and efficiency of semiconductor devices.
Latest Patents
One of Lin's latest patents addresses the reduction of punch-thru defects in damascene processing. This innovation involves fabricating a semiconductor device while mitigating conductive void formation in metallization layers. The process includes forming a substrate, a first dielectric layer, and a conductive trench, followed by the creation of an etch stop layer and a second dielectric layer. The method also incorporates a clean process to reduce surface charge on exposed portions of the etch stop layer, ultimately leading to reliable interconnects.
Another significant patent by Lin focuses on achieving reliable interconnects with low via/contact resistance. This invention utilizes two barrier layers for a via or contact, where a thin CVD barrier is deposited over the structure. A sputter etch is performed to remove the CVD barrier at the bottom of the via/contact, followed by the deposition of a second barrier that comprises a lower resistivity material. This innovative approach enhances the performance of semiconductor devices.
Career Highlights
Ching-Te Lin is currently employed at Texas Instruments Corporation, where he continues to develop cutting-edge technologies in semiconductor fabrication. His expertise and innovative mindset have positioned him as a key player in the industry.
Collaborations
Lin has collaborated with esteemed colleagues, including Jiong-Ping Lu and Phillip D Matz, to further advance semiconductor technologies. Their combined efforts have led to significant breakthroughs in the field.
Conclusion
Ching-Te Lin's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to shape the future of the industry, ensuring enhanced performance and reliability in semiconductor devices.