Location History:
- Jubei, TW (2005)
- Hsinchu, TW (2004 - 2006)
Company Filing History:
Years Active: 2004-2006
Title: Innovations by Chii-Ming Shiah
Introduction
Chii-Ming Shiah is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of photolithography, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of photolithography processes, which are crucial in semiconductor manufacturing.
Latest Patents
One of his latest patents is a method for fabricating a phase mask used in photolithography processes. This innovative method involves providing a substrate, forming a high transmission attenuate layer (HTAL) on it, and then creating an opaque layer on top. An ion-implanting process is performed in the HTAL, followed by etching the opaque layer to define phase regions. A photoresist layer is then applied, allowing for selective etching of the HTAL to create a phase-shifted region. This process results in a phase mask that achieves uniform exposure intensity.
Another significant patent is the design of an alternating phase shift mask. This mask consists of a transparent substrate with a light-shielding layer that defines a transparent array of alternating phase rows. The design includes a phase interference enhancement feature that is strategically placed to improve the mask's performance.
Career Highlights
Chii-Ming Shiah is currently employed at Winbond Electronics Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing photolithography techniques, which are essential for the production of integrated circuits.
Collaborations
Chii-Ming has collaborated with several talented individuals, including Yu-Cheng Tung and Jong-Bor Wang. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Chii-Ming Shiah's contributions to the field of photolithography through his innovative patents have significantly impacted semiconductor manufacturing. His work exemplifies the importance of innovation in advancing technology and improving production processes.