Chih-Ping Yen

Title: Chih-Ping Yen: Innovator in Semiconductor Technology

Introduction

Chih-Ping Yen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative work focuses on enhancing the performance and longevity of laser devices used in semiconductor manufacturing.

Latest Patents

One of his latest patents is titled "Mitigating long-term energy decay of laser devices." This invention involves an apparatus for manufacturing semiconductors that includes a power amplifier to power a laser, a catalyst disposed in the power amplifier, an inlet port, and an exhaust port. The inlet port introduces a mixing gas to the interior of the power amplifier during a cleaning operation, allowing the mixing gas to contact a surface of the catalyst that has a build-up. The mixing gas reacts with and removes the build-up by generating gaseous by-products, which are then expelled through the exhaust port.

Another notable patent is the "Method and apparatus for mitigating contamination." This extreme ultra violet (EUV) lithography method includes receiving EUV light by a scanner from an EUV light source. The EUV light passes through an intermediate focus in the scanner and is directed to a reticle. The invention also involves deflecting nanoparticles from the EUV light source away from the reticle by generating a gas flow using a gas jet, ensuring that the gas jet does not block the EUV light.

Career Highlights

Chih-Ping Yen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Chih-Ping Yen has collaborated with notable colleagues, including Yen-Shuo Su and Chun-Lin Louis Chang. These collaborations have contributed to the development of innovative solutions in the semiconductor field.

Conclusion

Chih-Ping Yen is a distinguished inventor whose work in semiconductor technology has led to several important patents. His contributions continue to shape the future of semiconductor manufacturing, demonstrating the impact of innovation in this critical industry.