Taipei County, Taiwan

Chien-Mao Liao

USPTO Granted Patents = 9 

Average Co-Inventor Count = 3.1

ph-index = 3

Forward Citations = 18(Granted Patents)


Location History:

  • Pan-Chiao, TW (2004)
  • Banchiau, TW (2004)
  • Shijr, TW (2004)
  • Taipei, TW (2005)
  • Taipei Hsien, TW (2005 - 2012)
  • Taipei County, TW (2012 - 2013)

Company Filing History:


Years Active: 2004-2013

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9 patents (USPTO):Explore Patents

Title: Innovations of Chien-Mao Liao

Introduction

Chien-Mao Liao is a prominent inventor based in Taipei County, Taiwan. He has made significant contributions to the field of technology, particularly in the area of chemical mechanical polishing (CMP) apparatus. With a total of 9 patents to his name, Liao's work has had a substantial impact on the industry.

Latest Patents

One of Liao's latest patents is a distance monitoring device designed for use in CMP apparatus. This device features a polishing head that includes a frame and a membrane, with a plurality of air bags formed by the membrane and the frame. The distance monitoring device incorporates several distance detectors positioned on the frame, each corresponding to the air bags. These detectors measure the distance between reference points on the frame and the membrane, enhancing the precision of the polishing process.

Another notable patent is the manufacturing method of a device and planarization process. This method involves providing a substrate with various patterns and openings. A first liquid supporting layer is formed on the patterns, filling the openings. This layer is then transformed into a solid supporting layer, which includes supporting elements formed in the openings. A treatment process is performed on the patterns, followed by the transformation of the solid supporting layer into a second liquid supporting layer, which is subsequently removed.

Career Highlights

Chien-Mao Liao is currently associated with Nan Ya Technology Corporation, where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of CMP apparatus, making processes more efficient and effective.

Collaborations

Liao has collaborated with several talented individuals in his field, including Shing-Yih Shih and Chang-Rong Wu. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Chien-Mao Liao's contributions to the field of technology through his patents and innovative methods have established him as a key figure in the industry. His work continues to influence advancements in chemical mechanical polishing and related technologies.

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