Chien-Chih Lee

Title: **Innovations by Inventor Chien-Chih Lee**

Introduction

Chien-Chih Lee is a prominent inventor based in Hsinchu, Taiwan, recognized for his impactful contributions to the field of semiconductor technology. With a total of two patents to his name, he has made significant strides in the development of etching methods and photomask technologies that enhance the fabrication of multi-level terraced structures in semiconductor substrates.

Latest Patents

Chien-Chih Lee's latest patents focus on innovative techniques in anisotropic wet etching. The first patent, titled "Anisotropic Wet Etching," reveals a method that includes a specially designed photo mask for etching suited for anisotropic wet etching. This invention allows for the preparation of a multi-level terrace structure with fine corners during the etching process. The photo mask contains a pattern with adjacent corners that have substantially rectangular angles, incorporating compensational patterns that lead to improved etching results.

The second patent, known as "Etching Method for Multi-Level Terraced Structures," describes a systematic approach utilizing a photomask to prepare an etching mask on a semiconductor substrate. This method enables the fabrication of a multi-level terraced structure while controlling the etching rate of the material. Such advancements allow for the strategic design of widths and heights of all levels within a single etching step, increasing efficiency and precision in semiconductor manufacturing.

Career Highlights

Chien-Chih Lee is affiliated with the Industrial Technology Research Institute (ITRI), where he has been instrumental in advancing semiconductor technologies. His tenure at ITRI has been marked by innovative research and development, contributing to the institute's reputation as a leader in technological advancements.

Collaborations

Throughout his career, Chien-Chih Lee has collaborated with notable colleagues, including Chen-Kuei Chung and Ching-Yi Wu. These partnerships have enhanced the research output and innovation pipelines within the organizations they work for, further driving the evolution of semiconductor technology.

Conclusion

Chien-Chih Lee's contributions to the semiconductor industry are commendable, particularly through his patents focused on etching processes and photomask technology. His work not only reflects his technical expertise but also signifies a substantial impact on the advancement of semiconductor manufacturing techniques. As the industry continues to evolve, inventors like Chien-Chih Lee play a pivotal role in driving innovation and shaping the future of technology.