This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2003-2010.
Company Filing History:
Years Active: 2003-2010
Title: Chia-Tung Ho: Innovator in Semiconductor Technology
Introduction
Chia-Tung Ho is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His innovative methods have advanced the processes used in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Method of forming planarized coatings on contact hole patterns of various duty ratios." This method describes a technique for creating a planarized photoresist coating on substrates with holes of varying duty ratios. The process involves coating a first photoresist, which is primarily composed of a Novolac resin and a diazonaphthoquinone photoactive compound, on a substrate and baking it at or slightly above its glass transition temperature (Tg) to allow it to reflow and fill the holes. The photoresist is then exposed without a mask, allowing the developer to thin it to a recessed depth within the holes. After hardening the photoresist with a 250°C bake, a second photoresist is applied to create a planarized film with minimal thickness variation. This method is particularly useful in forming trench patterns in dual damascene processes and in fabricating MIM capacitors.
Another notable patent is the "Method to preserve alignment mark optical integrity." This method protects alignment mark areas during a chemical mechanical polishing (CMP) process. It involves forming multiple material layers over the semiconductor wafer's process surface, including active areas and alignment mark trenches. The process includes lithographically patterning and etching the second material layer to create lines adjacent to the alignment mark trenches, followed by a CMP process to remove portions of the second material layer.
Career Highlights
Chia-Tung Ho is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in semiconductor manufacturing processes. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor production.
Collaborations
He has collaborated with notable colleagues, including Feng-Jia Shih and Jieh-Jang Chen, contributing to various projects that push the boundaries of semiconductor technology.
Conclusion
Chia-Tung Ho's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.