Chia-Ming Wu

Title: Chia-Ming Wu: Innovator in Semiconductor Technology

Introduction

Chia-Ming Wu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His innovative work focuses on methods for fabricating flash memory and semiconductor processes.

Latest Patents

One of his latest patents is a method of fabricating flash memory. This method involves providing a fin structure that includes a floating gate material, an oxide layer, and a semiconductive layer. An insulating layer is placed on both sides of the fin structure, followed by a dielectric layer that covers the floating gate material and insulating layer. The process continues with the stacking of a patterned first mask layer, a patterned second mask layer, and a control gate on the dielectric layer. The control gate crosses at least one fin structure, and an isotropic etching step is performed to remove the exposed dielectric layer entirely.

Another notable patent is related to a semiconductor process for manufacturing specific patterns. This process includes forming a target layer and evenly spaced core bodies on a substrate. A hard mask layer is conformally formed, followed by the application of a first photoresist that covers a predetermined region on the hard mask layer. This region encompasses at least two core bodies. A first etch process is then performed to remove a portion of the hard mask layer outside the predetermined region, exposing several core bodies. The exposed core bodies are removed, and a second photoresist is formed to encompass all the recesses in the predetermined region. Finally, a second etch process is conducted to pattern the target layer.

Career Highlights

Chia-Ming Wu has worked with notable organizations such as Powerchip Technology Corporation and National Taiwan University. His experience in these institutions has allowed him to develop and refine his innovative techniques in semiconductor technology.

Collaborations

Some of his coworkers include Mau-Pin Hsu and Chia-En Lee, who have collaborated with him on various projects in the field.

Conclusion

Chia-Ming Wu is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the industry. His patents reflect his innovative approach to solving complex challenges in flash memory fabrication and semiconductor processes.