Location History:
- Changhua County, TW (2018 - 2023)
- Hsinchu, TW (2023)
Company Filing History:
Years Active: 2018-2025
Title: Innovations of Chia-Hsi Wang
Introduction
Chia-Hsi Wang is a prominent inventor based in Changhua County, Taiwan. He has made significant contributions to the field of physical vapor deposition (PVD) technology, holding a total of 12 patents. His work focuses on enhancing the efficiency and effectiveness of film deposition processes.
Latest Patents
Among his latest patents is a method for in situ and tunable deposition of a film. This method involves introducing a first physical vapor deposition (PVD) target and a second PVD target into a PVD system. The first target contains a boron-containing cobalt iron alloy (FeCoB) with an initial boron concentration, while the second target contains boron. The method determines parameters of the PVD system based on a target boron concentration larger than the initial boron concentration, allowing for the deposition of a FeCoB film on a substrate according to these parameters.
Another notable patent is related to physical vapor deposition (PVD) with target erosion profile monitoring. This PVD system includes a chamber body, a substrate support, a PVD target, and a target profile monitoring subsystem. The PVD target consists of a target plate made from a target material and a backing plate. The design of the target plate includes a central section and a peripheral section, with the peripheral section having a greater thickness than the central section. The monitoring subsystem is designed to track the usage of the target plate effectively.
Career Highlights
Chia-Hsi Wang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the field of semiconductor manufacturing. His expertise in PVD technology has made him a valuable asset to the company.
Collaborations
He has collaborated with notable coworkers, including Yen-Yu Chen and Kun-Che Ho, contributing to various projects that enhance the capabilities of PVD systems.
Conclusion
Chia-Hsi Wang's contributions to the field of physical vapor deposition are significant, with multiple patents that advance technology in semiconductor manufacturing. His work continues to influence the industry and drive innovation forward.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.