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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12180576 B1

PDFFull Text
Date of Patent:
Dec. 31, 2024

Filed:

Jul. 27, 2023

Pvd target design and semiconductor devices formed using the same

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chia-Hsi Wang, Hsinchu, TW;

Yen-Yu Chen, Hsinchu, TW;

Yi-Chih Chen, Hsinchu, TW;

Shih-Wei Bih, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Seed IP Law Group LLP

Primary Examiner:

Jaehwan Oh

Int. Cl.
CPC ...
H01L 21/768 (2006.01); C23C 14/14 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01); H01L 21/285 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/14 (2013.01); C23C 14/3464 (2013.01); H01J 37/3429 (2013.01); H01J 37/3435 (2013.01); H01L 21/2855 (2013.01); H01L 21/76802 (2013.01); H01L 21/7684 (2013.01); H01L 21/76843 (2013.01); H01L 21/76877 (2013.01); H01L 23/53238 (2013.01);
Abstract

A physical vapor deposition (PVD) target for performing a PVD process is provided. The PVD target includes a backing plate and a target plate coupled to the backing plate. The target plate includes a sputtering source material and a dopant, with the proviso that the dopant is not impurities in the sputtering source material. The sputtering source material includes a diffusion barrier material.

Find Patent Forward Citations

Wang, Chia-Hsi. (2024). Pvd target design and semiconductor devices formed using the same (U.S. Patent No. 12180576). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12180576

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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